Author/Authors :
Ma، نويسنده , , Hong-Lei and Hao، نويسنده , , Xiaotao and Ma، نويسنده , , Jin and Yang، نويسنده , , Yingge and Huang، نويسنده , , Shu-Lai and Chen، نويسنده , , Feng and Wang، نويسنده , , Qing-pu and Zhang، نويسنده , , De-Heng، نويسنده ,
Abstract :
Highly transparent conducting Al-doped zinc oxide (ZnO:Al) films with good adherence were deposited on water-cooled polypropylene adipate (PPA) substrate using bias r.f. magnetron sputtering. Films with resistivities as low as 4.6×10−4 Ω cm and transmittance over 80% have been obtained by adjusting the negative bias voltage of the substrate. The dependence of the structural, electrical and optical properties of these films on the substrate bias voltage was studied in detail.
