Title of article
Bias voltage dependence of properties for ZnO:Al films deposited on flexible substrate
Author/Authors
Ma، نويسنده , , Hong-Lei and Hao، نويسنده , , Xiaotao and Ma، نويسنده , , Jin and Yang، نويسنده , , Yingge and Huang، نويسنده , , Shu-Lai and Chen، نويسنده , , Feng and Wang، نويسنده , , Qing-pu and Zhang، نويسنده , , De-Heng، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2002
Pages
4
From page
58
To page
61
Abstract
Highly transparent conducting Al-doped zinc oxide (ZnO:Al) films with good adherence were deposited on water-cooled polypropylene adipate (PPA) substrate using bias r.f. magnetron sputtering. Films with resistivities as low as 4.6×10−4 Ω cm and transmittance over 80% have been obtained by adjusting the negative bias voltage of the substrate. The dependence of the structural, electrical and optical properties of these films on the substrate bias voltage was studied in detail.
Keywords
Magnetron sputtering , Organic substrate , Al-doped zinc oxide films
Journal title
Surface and Coatings Technology
Serial Year
2002
Journal title
Surface and Coatings Technology
Record number
1804625
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