Electrostatic quadrupole plasma mass spectrometer and Langmuir probe measurements of mid-frequency pulsed DC magnetron discharges

Time-averaged ion energy distributions (IEDs) and time-resolved floating potentials were measured for a range of reverse times at electrodes immersed in a 60 kHz pulsed magnetron discharge, and compared to the DC condition. The time-averaged IEDs correlate well to the time-resolved target voltage waveforms. From the measured data, electron temperatures for both pulsed and DC discharges were calculated to be approximately 2.5–3.0 eV, even at the ‘positive spike’ on the cathode voltage waveform observed during pulsing. Titanium oxide thin films were deposited in pulsed and DC discharges. Structure and properties of the deposited films were measured using glancing incidence X-ray diffraction and nanoindentation. Changes in crystallographic texture and hardness were observed as pulsing conditions were varied.