Title of article :
Deposition of NbN thin films onto high-speed steel using reactive magnetron sputtering for corrosion protective applications
Author/Authors :
Fenker، نويسنده , , M and Balzer، نويسنده , , M and Büchi، نويسنده , , R.V and Jehn، نويسنده , , H.A and Kappl، نويسنده , , H and Lee، نويسنده , , J.-J، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2003
Abstract :
Hard niobium nitride films were deposited onto high-speed steel (HSS) using reactive magnetron sputtering. Experiments were carried out by varying the nitrogen partial pressure. The porosity and corrosion behavior of the NbNx/HSS samples were studied by a copper decoration test and by potentiodynamic corrosion tests in 0.8 M NaCl solution (pH 7), respectively. The corrosion tests revealed that the NbN/HSS system has a very broad passivation range with a low current density. Further film properties were investigated by scanning electron microscopy (SEM), X-ray diffraction (XRD), scratch testing and microhardness measurements. Good adhesion and very high plastic universal-hardness values in the range of 34 000–53 000 N/mm2 were found for the NbN thin films.
Keywords :
Magnetron sputtering , niobium nitride , Copper decoration test , Hard coating , Corrosion test
Journal title :
Surface and Coatings Technology
Journal title :
Surface and Coatings Technology