Title of article
Deposition of NbN thin films onto high-speed steel using reactive magnetron sputtering for corrosion protective applications
Author/Authors
Fenker، نويسنده , , M and Balzer، نويسنده , , M and Büchi، نويسنده , , R.V and Jehn، نويسنده , , H.A and Kappl، نويسنده , , H and Lee، نويسنده , , J.-J، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
7
From page
169
To page
175
Abstract
Hard niobium nitride films were deposited onto high-speed steel (HSS) using reactive magnetron sputtering. Experiments were carried out by varying the nitrogen partial pressure. The porosity and corrosion behavior of the NbNx/HSS samples were studied by a copper decoration test and by potentiodynamic corrosion tests in 0.8 M NaCl solution (pH 7), respectively. The corrosion tests revealed that the NbN/HSS system has a very broad passivation range with a low current density. Further film properties were investigated by scanning electron microscopy (SEM), X-ray diffraction (XRD), scratch testing and microhardness measurements. Good adhesion and very high plastic universal-hardness values in the range of 34 000–53 000 N/mm2 were found for the NbN thin films.
Keywords
Magnetron sputtering , niobium nitride , Copper decoration test , Hard coating , Corrosion test
Journal title
Surface and Coatings Technology
Serial Year
2003
Journal title
Surface and Coatings Technology
Record number
1804871
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