Nanopatterning on aluminum surfaces with AFM probe

Aluminum specimens covered with anodic oxide films were scratched with a silicon probe tip of atomic force microscope in pure water, CuSO4 solutions, Cu-electroless plating solutions and diluted NaOH solutions. The rate of groove development (Rgd) was in the order NaOH>CuSO4>pure water>Cu-electroless solution, and increased with increasing probe load and scratch number. Wear of the silicon probe tip was also examined by scratching many times in pure water and NaOH solution. It was greater in NaOH solution than in pure water. A silicon tip coated with polycrystalline diamond showed a high processing capability and wear resistance.