Initial growth stage evaluation of high-quality diamond films synthesized by the chamber flame method

The crystallinity of 5-μm-thick polycrystalline and single-crystal diamond films, which was synthesized by the chamber flame method, was evaluated by means of cathodeluminescence spectral analysis. Crystal defects are found in the initial growth grains in the polycrystalline diamond films. However, defect-free high-quality single-crystalline diamond films can be synthesized at the rate of approximately 20 μm/h in the case of homoepitaxial growth.