Title of article
Development and calibration of standards for the coating thickness in the range of micrometer and nanometer
Author/Authors
Hoffmann، نويسنده , , K.-P. and Ahbe، نويسنده , , T. and Herrmann، نويسنده , , K. and Hasche، نويسنده , , K. and Pohlenz، نويسنده , , F. and Sun، نويسنده , , J.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
3
From page
732
To page
734
Abstract
PTB carries out investigations to develop, manufacture and calibrate reference standards for the coating thickness in the range from approximately 10 nm to 50 μm. The fundamental measurements ensuring the traceability to internationally accepted metrological standards are made by scanning electron microscopy and scanning force microscopy. Examples of standards are presented. The manufacture of sets of standards for practical applications is in preparation.
Keywords
Traceability , Monolayer , Scanning electron microscopy , Atom force microscopy , Interferometry , Profilometry
Journal title
Surface and Coatings Technology
Serial Year
2003
Journal title
Surface and Coatings Technology
Record number
1805910
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