• Title of article

    Effect of electron collisions on the plasma–sheath formation

  • Author/Authors

    Kang، نويسنده , , S.W. and Min، نويسنده , , Kelvin K.W. and Lee، نويسنده , , E.S. and Seon، نويسنده , , J.، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2003
  • Pages
    5
  • From page
    173
  • To page
    177
  • Abstract
    The effects of electron collisions in the plasma–sheath are numerically investigated. We employ a one-dimensional electrostatic particle-in-cell code, with collisions incorporated using the Monte Carlo method. While it has been reported previously that the presheath potential drop increases with the ion collision frequency, the effects of electron collisions were not explored. The present study shows the inclusion of electron collisions reduces the potential drop, especially in the presheath region. The result is more or less the same when a weak magnetic field is imposed. We note that the reduced electron flux, caused by electron collisions, makes the presheath potential drop shallower as the required ion drift motions to balance the electron current are smaller.
  • Keywords
    Monte Carlo Method , Electron collisions
  • Journal title
    Surface and Coatings Technology
  • Serial Year
    2003
  • Journal title
    Surface and Coatings Technology
  • Record number

    1805995