Title of article
Deposition of fluorocarbon polymer films in a dielectric barrier discharge (DBD)
Author/Authors
Vinogradov، نويسنده , , I.P and Dinkelmann، نويسنده , , A and Lunk، نويسنده , , A، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
6
From page
509
To page
514
Abstract
Investigations of an intermittent dielectric barrier discharge in fluorocarbon mixtures at atmospheric pressure are reported. Plasma diagnostics were performed by FTIR-absorption spectroscopy as well as by emission/absorption spectroscopy in the UV/VIS range. Deposited polymer films were investigated by FTIR absorption spectroscopy, XPS, SEM and surface energy measurements. The results of the film property measurements show a correlation to the results of plasma diagnostics.
Keywords
Dielectric barrier discharge , Fluorocarbon films , Plasma deposition
Journal title
Surface and Coatings Technology
Serial Year
2003
Journal title
Surface and Coatings Technology
Record number
1806523
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