Localized deposition by μ-jet-CVD

A gas jet from a capillary was excited by an electrical discharge and produces a localized deposition. In a stationary experiment one obtains a spot-like peak-shaped deposition while a moving capillary can ‘write’ the deposition. If a jet of hexamethyldisiloxane passes an oxygen plasma, the deposition is quartz-like. With an acetylene jet, a deposition rate of approximately 240 μm/s and a mass conversion from the gas into the deposition of more than 20% were observed.