Deposition of amorphous carbon using a shunting arc discharge

Using the shunting arc discharge, preparation of a hydrogen free diamond-like carbon (DLC) film is demonstrated. The substrate is immersed into the plasma, and a series of pulse voltage is applied to the substrate was synchronized with a generation of the shunting arc with a peak current of 1.7 kA. The prepared film has a smooth surface with a dark blue color, with only droplets even without filtering system. The film is amorphous and a typical Raman spectrum with the D and G band is observed. The film thickness is largest in a voltage range of −4 to −8 kV, from which it is inferred that the carbon ions contribute to the film preparation.