Title of article
Hardness enchancement by CN/TiCN/TiN multilayer films
Author/Authors
Morant، نويسنده , , C and Prieto، نويسنده , , P and Forn، نويسنده , , A and Picas، نويسنده , , J.A and Elizalde، نويسنده , , E and Sanz، نويسنده , , J.M، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2004
Pages
7
From page
512
To page
518
Abstract
The first objective of this paper is to deposit new hard coatings based on compositionally modulated CN/TiCN/TiN multilayer films by dual ion beam sputtering using a combination of TiN, TiC and C targets and an Ar–N2 mixture discharge gas. The second objective is to evaluate the physical and chemical characteristics of the multilayer with respect to their practical applications. In this work, we have studied the composition, morphology, hardness and friction coefficient of the films. The deposition parameters were controlled to obtain films that combine ultrahard behaviour with good tribological and wear properties.
Keywords
Hardness enhancement , Carbon nitride/titanium carbonitride multilayer , Nanoindentation , Ion beam assisted deposition , Hard Coatings
Journal title
Surface and Coatings Technology
Serial Year
2004
Journal title
Surface and Coatings Technology
Record number
1807758
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