Title of article :
MEVVA ion source development and its industrial applications at Beijing Normal University
Author/Authors :
Liu، نويسنده , , A.D and Zhang، نويسنده , , H.X. and Zhang، نويسنده , , T.H.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2005
Abstract :
Metal Vapor Vacuum Arc (MEVVA) ion source and ion implanter developed in Beijing Normal University (BNU) is introduced. The application in surface modification of materials with MEVVA ion implanter is reviewed.
Keywords :
Industrial application , Mevva ion source
Journal title :
Surface and Coatings Technology
Journal title :
Surface and Coatings Technology
