Title of article :
Properties of NdFeB film grown on silicon substrate by PLD under external magnetic field
Author/Authors :
Zheng، نويسنده , , Pan and Haik، نويسنده , , Yousef and Chen، نويسنده , , Ching-Jen and Jiang، نويسنده , , Zhaoning and Zheng، نويسنده , , Jim P.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2005
Abstract :
Nd–Fe–B films were grown on silicon substrate subjected to perpendicular magnetic field using pulsed laser deposition. The effect of substrate temperature (250–650 °C) on the magnetic properties of the film was studied. Magnetic anisotropy was observed in amorphous deposited film. Minor Nd2Fe14B crystalline phase was found when films were deposited at 500 °C and 650 °C. No obvious magnetic crystalline anisotropy shown after the correction of shape anisotropy.
Keywords :
Thin film , pulsed laser deposition , Magnetic MEMS
Journal title :
Surface and Coatings Technology
Journal title :
Surface and Coatings Technology
