Title of article
Influence of ion energies on the surface morphology of carbon films
Author/Authors
Li، نويسنده , , L.H. and Tian، نويسنده , , J.Z. and Cai، نويسنده , , X. and Chen، نويسنده , , Q.L and Xu، نويسنده , , M. and Wu، نويسنده , , Y.Q. and Fu، نويسنده , , Ricky K.Y and Chu، نويسنده , , Paul K.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
5
From page
241
To page
245
Abstract
Diamond-like carbon (DLC) films were deposited using vacuum arc deposition (VAD) and plasma immersion ion implantation and deposition (PIII and D). The surface morphologies of these films were investigated using atom force microscopy (AFM). Raman spectroscopy results show that the films have different microstructures. Based on the AFM images and Raman spectra, the aromatic ring cluster diameters hardly affect the surface morphology of the films, but the surface growth and nucleation are all subjected to the ion energies and the substrate temperature determines the surface morphology of the films.
Keywords
Plasma immersion ion implantation , Deposition , surface morphology , Carbon films , Vacuum arc deposition
Journal title
Surface and Coatings Technology
Serial Year
2005
Journal title
Surface and Coatings Technology
Record number
1809591
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