Optimization and thermal stability of TiAlN/Mo multilayers

In this work we focus on the optimization and thermal stability of nanocomposite TiAlN/Mo multilayers that were produced by reactive magnetron sputtering on high-speed steel substrates, with modulation periods below 5 nm. These multilayers were annealed between 600–900 °C for 1 h in a vacuum furnace. Preliminary X-ray results reveal that these coatings are very stable up to 900 °C, since the multilayer chemical modulation is not severely affected. At intermediate annealing temperatures the modulation period decreases due to interdiffusion at the interface, resulting in a thicker interface between metal/nitride and hence decreasing the thickness of those layers.