Title of article :
Study of deposition and post-oxidation of d.c. magnetron sputtered W/Fe bilayers
Author/Authors :
Plantin، نويسنده , , P. E. Thomann، نويسنده , , A.-L. and Brault، نويسنده , , P. and Dumax، نويسنده , , B. and Mathias، نويسنده , , Frederic J. de Sauvage، نويسنده , , T. and Pineau، نويسنده , , A.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2005
Abstract :
W/Fe bilayer metallic coatings are deposited by d.c. magnetron sputtering on an Fe substrate. Correlation between the deposition parameters and the film characteristics are investigated. The coatings exhibit small grain sizes and dense structure for high target power and low argon pressure, leading to well adhesive films. Bilayer post oxidation process is preformed in order to form Fe3O4 at the surface (W/Fe3O4). The ability of the Fe layer to be oxidised is also studied depending on the bilayer deposition parameters.
Keywords :
Multilayer , sputtering , Magnetron , Tungsten , Iron , iron oxide
Journal title :
Surface and Coatings Technology
Journal title :
Surface and Coatings Technology