Title of article :
Properties of nano-multilayered hard coatings deposited by a new hybrid coating process: Combined cathodic arc and unbalanced magnetron sputtering
Author/Authors :
Yamamoto، نويسنده , , Kenji and Kujime، نويسنده , , Susumu and Takahara، نويسنده , , Kazuki، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2005
Pages :
5
From page :
435
To page :
439
Abstract :
Nano-scale multilayered coatings of (Ti,Al)N/SiN, (Ti,Al)N/WN, and CrN/BCN were deposited by a new hybrid coating process that combined cathodic arc and unbalanced magnetron sputtering (UBM). Cross-sectional transmission electron microscopy (TEM) analysis of the coatings deposited by the hybrid process revealed that these coatings had a multilayer structure in that layers deposited by the arc source and the sputter source were stacked alternatively. The bilayer period of the multilayer system was the function of the substrate rotation speed and the input power to the each evaporation source, and it was typically in the range of 10–20 nm. From X-ray diffraction measurements, in case of Si or B4C target used as a sputter target, the grain size was drastically decreased from 30 to 10 nm as the evaporation rate of the sputter source was increased. We confirmed from TEM observation that the grain growth of the (Ti,Al)N or CrN layer was interrupted at the interface and this resulted in much smaller grain size compared to the conventional (Ti,Al)N coating. Mechanical and tribological properties of different nano-multilayered coatings are discussed.
Keywords :
Cathodic arc , Hybrid coating process , Unbalanced magnetron sputtering , Nano-multilayer , cutting performance
Journal title :
Surface and Coatings Technology
Serial Year :
2005
Journal title :
Surface and Coatings Technology
Record number :
1810099
Link To Document :
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