Characteristics of inductively coupled plasma with multiple U-type internal antenna for flat panel display applications

In this study, the characteristics of large area internal linear ICP sources of 1020 mm×920 mm (substrate area is 880 mm×660 mm) were investigated using two different types of antennas, that is, a conventional serpentine-type antenna and a newly developed multiple U-type antenna. The multiple U-type antenna showed higher plasma density, higher radical density, and more plasma stability compared to the serpentine-type antenna, and it appears from the higher inductive coupling and less standing wave effect compared to the serpentine-type antenna. Using the multiple U-type antenna, the plasma density of 2×1011/cm3 with the plasma uniformity of 4% could be obtained using 15 mTorr Ar and 5000 W of RF power.