Title of article :
Comparison of the ionisation efficiency in a microwave and a radio-frequency assisted magnetron discharge
Author/Authors :
de Poucques، نويسنده , , L. and Imbert، نويسنده , , J.C. and Vasina، نويسنده , , P. and Boisse-Laporte، نويسنده , , C. and Teulé-Gay، نويسنده , , L. and Bretagne، نويسنده , , J. and Touzeau، نويسنده , , M.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2005
Abstract :
While most of Ionised Physical Vapour Deposition (IPVD) reactors use radio-frequency coils to create additional ionisation, we developed an alternative technique using two microwave antennas to achieve the ionisation of the sputtered vapour. The aim of this paper is to compare the ionisation efficiency of these two devices in the same reactor chamber.
Keywords :
IPVD , sputtering , Microwave discharge , RF discharge , Absorption spectroscopy
Journal title :
Surface and Coatings Technology
Journal title :
Surface and Coatings Technology
