Plasma and ion beam characterization by non-conventional methods

For optimization and adjustment of ion beam sources in surface application, knowledge of physical beam parameters and plasma processes in the ion source has to be provided by suitable diagnostics. For this purpose, novel–but relatively simple (and cheap)–diagnostic methods which complete the common diagnostics are suggested. -called “non-conventional” methods are:• and radial determination of the ion beam profile by energy flux measurements, ization of the ion beam by interaction with a cloud of micro-disperse particles, and terization of the sheath region in the plasma source by sheath photometry.