Title of article
Densities of N- and O-atoms in N2–O2 flowing glow discharges by actinometry
Author/Authors
Henriques، نويسنده , , J. and Villeger، نويسنده , , S. and Levaton، نويسنده , , J. and Nagai، نويسنده , , J. and Santana، نويسنده , , S. and Amorim، نويسنده , , J. and Ricard، نويسنده , , A.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
4
From page
814
To page
817
Abstract
In conditions of N2 and N2–O2 glow discharges at low power ( 30–150 W ) and low gas pressure ( 0.1–50 Torr ), the N- and O-atom densities can be determined by adding few percents of Ar gas as an actinometer and by measuring the Ar I 750.4, 811.5 nm, NI 744.2, 746.5, 821.6 nm and OI 777.3, 844.6 nm spectral line intensities. The actinometry control and calibration have to be obtained by TALIF for DC discharges and by NO titration for flowing microwave discharges.
Keywords
optical spectroscopy , Actinometry , Reactive glow discharges
Journal title
Surface and Coatings Technology
Serial Year
2005
Journal title
Surface and Coatings Technology
Record number
1810241
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