Characteristics of plasma parameters in N2/Ar ECR plasma for nitridation

Characteristics of plasma parameters in N2/Ar ECR plasma are investigated experimentally and numerically. Especially we focused on the characteristics of some plasma parameters from the viewpoint of high-efficiency production of atomic nitrogen N. As a result, it was found experimentally that the electron temperature increased locally in the downstream region within limited conditions of pressure, magnetic field and mixture ratio. In addition, one-dimensional fluid simulation was carried out successfully and indicated that N2+ can have a unique axial distribution corresponding to the experimental conditions.