Experimental and theoretical investigations of ion current density distribution in PVD coating chamber

In this study we investigated shape and value of ion current by measurement using round probes in the coating chamber with three simultaneously operating cathodes. A simple model with a macroscopic approach of the problem for the angular and distance distribution of the ion current is used to calculate the quantitative and qualitative relations between the shapes and the absolute values of the arc current and the ion current in the coating chamber. The model consists of three parts. Each of them describes the spotsʹ movement and splitting during pulse and d.c. phases, depending on its own and the external magnetic fields, the geometrical ion current distribution and the processes on substrate, where e.g. implantation and sputtering depend on bombarding angle. Good agreement is found between the results derived from numerical simulation and experiment.