Author/Authors :
Hubi?ka، نويسنده , , Z. and Cada، نويسنده , , M. and Adamek، نويسنده , , P. and Virostko، نويسنده , , P. and Olejn??ek، نويسنده , , J. and Deyneka، نويسنده , , A. and Jastrabik، نويسنده , , L. and Jurek، نويسنده , , K. and Suchaneck، نويسنده , , G. and Guenther، نويسنده , , M. and Gerlach، نويسنده , , G. and Boh??، نويسنده , , P.، نويسنده ,
Abstract :
The RF modulated plasma jet system was investigated during the deposition of Pb(ZrxTi1−x)O3 (PZT) thin films on polymer substrates. PZT films were deposited simultaneously on Si and polymer substrates with Pt layer. The time resolved system with RF compensated Langmuir probe was used for measurement of the evolution of the plasma jet parameters in the location of the substrate during the modulation cycle. Analysis of deposited PZT films has shown that stoichiometry was dependent on energy of ions bombarding the substrate.
Keywords :
PZT thin films , Langmuir Probe , Plasma impedance , Plasma jet
