Author/Authors :
Walker، نويسنده , , M. and Meermann، نويسنده , , F. and Schneider، نويسنده , , J. and Bazzoun، نويسنده , , K. and Feichtinger، نويسنده , , J. and Schulz، نويسنده , , A. S. Kruger، نويسنده , , J. M. Schumacher، نويسنده , , U.، نويسنده ,
Abstract :
The present paper mainly deals with the development and characterization of plasma polymerized SiOx barrier films on polyethyleneterephthalate (PET). Hexamethyldisiloxane (HMDSO) in mixture with oxygen (O2) are used as deposition gases. The chemical composition and the morphology of the films are characterized by infrared absorption measurements and by REM investigations. The oxygen permeability was measured as a function of time with the carrier gas method using a ceramic (ZrO2) detector.
Keywords :
SiOx , microwave plasma , Pulsed plasma , permeation , Barrier films
