Title of article
Investigations of plasma polymerized barrier films on polymeric materials
Author/Authors
Walker، نويسنده , , M. and Meermann، نويسنده , , F. and Schneider، نويسنده , , J. and Bazzoun، نويسنده , , K. and Feichtinger، نويسنده , , J. and Schulz، نويسنده , , A. S. Kruger، نويسنده , , J. M. Schumacher، نويسنده , , U.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
6
From page
947
To page
952
Abstract
The present paper mainly deals with the development and characterization of plasma polymerized SiOx barrier films on polyethyleneterephthalate (PET). Hexamethyldisiloxane (HMDSO) in mixture with oxygen (O2) are used as deposition gases. The chemical composition and the morphology of the films are characterized by infrared absorption measurements and by REM investigations. The oxygen permeability was measured as a function of time with the carrier gas method using a ceramic (ZrO2) detector.
Keywords
SiOx , microwave plasma , Pulsed plasma , permeation , Barrier films
Journal title
Surface and Coatings Technology
Serial Year
2005
Journal title
Surface and Coatings Technology
Record number
1810292
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