W–S–C sputtered films: Influence of the carbon alloying method on the mechanical properties

In this work, W–S–C films were deposited by both a reactive process in an Ar + CH4 atmosphere and co-sputtering WS2 and C targets. The chemical and physical characterization showed that the properties of the W–S–C films are very similar for both systems. The films without and with low C content have columnar appearance, which develops to a very compact “featureless” morphology for the highest C-alloyed films. The WS2 phase was detected for low alloyed films. In reactive deposited films, there was a loss of crystallinity with increasing C content. The films co-sputtered with C are amorphous. The evolution of the hardness and adhesion with increasing C-content follows a similar trend in the films deposited by both processes: they increase with C content.