Raman and XPS studies of DLC films prepared by a magnetron sputter-type negative ion source

The characteristics of diamond-like carbon (DLC) films deposited on a 4-in. Si (100) substrate using a magnetron sputter-type negative ion source (MSNIS) were investigated using Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) method. In the MSNIS source, a negative ion beam is generated by a cesium-induced sputter-type secondary negative ion emission process. DLC films deposited using this MSNIS technique were compared with films prepared using a conventional magnetron sputter process under various deposition conditions. Since the final energy of the negative ion arriving at the substrate is a function of the cathode voltage, the cathode voltage dependence of the film properties was investigated. As the applied voltage is increased, the more diamond-like properties were observed. Overall results suggest that the sp3 bonding of DLC film can be effectively controlled using a MSNIS.