Effects of Al contents on microstructures of Cr1−XAlXN and Zr1−XAlXN films synthesized by cathodic arc method

Cr1−XAlXN and Zr1−XAlXN (0≤×≤1.0) films were synthesized by the cathodic arc method using alloy and metal targets. The X-ray diffraction patterns showed that the Cr1−XAlXN changed from cubic structure at X=0.6 to hexagonal structure at X=0.7. The peaks of Zr1−XAlXN showed the NaCl structure at X=0.37 and changed to wurtzite structure at X=0.50. The lattice parameter of Cr1−XAlXN films changed from 0.416 nm (X=0) to 0.413 nm (X=1.0), and that of Zr1−XAlXN changed from 0.458 nm (X=0) to 0.444 nm (X=0.37). The maximum microhardness of Cr1−XAlXN and Zr1−XAlXN films was 27 GPa (X=0.6) and 29 GPa (X=0.37), respectively. Changes in microstructures-related transition from the cubic to hexagonal were studied, and corresponding hardness changes were discussed in Cr1−XAlXN and Zr1−XAlXN.