Effects of boron contents on microstructures and microhardness in CrxAlyN films synthesized by cathodic arc method

CrxAlyBzN films were synthesized by the cathodic arc method, using CrxAlyBz alloy cathode with differing z values from 0 to 0.10 and investigated with respect to crystal structures, lattice parameters and microhardness. The microhardness of CrxAlyBzN increased from 27 (z = 0) to 33 GPa (z = 0.10). The lattice parameters of CrxAlyBzN decreased from 0.413 (z = 0) to 0.410 nm (z = 0.10), keeping the cubic structure. The columnar structure of CrxAlyBzN disappeared and grain size decreased with incorporations of B atoms. In this study, CrxAlyBzN films were characterized by X-ray and electron microscopy analysis and the relationship between microstructure and microhardness was discussed as a function of B contents.