Title of article
TiSiN nanocomposite coatings by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD)
Author/Authors
J. Perez-Mariano، نويسنده , , J. and Lau، نويسنده , , K.-H. and Sanjurjo، نويسنده , , A. and Caro، نويسنده , , J. and Casellas، نويسنده , , D. and Colominas، نويسنده , , C.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2006
Pages
9
From page
2217
To page
2225
Abstract
TiSiN nanocomposite coatings were deposited on stainless steel by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD) by reaction of TiCl4 and SiCl4 with NH3 at 850 °C. Coatings were characterized by means of GD-OES, XPS and XRD. TiSiN coatings with a Si content of 9 at.% showed a hardness of 28 GPa (the hardness of TiN and SiNx coatings was around 21 GPa) and a lower oxidation rate under dry air at 600 °C. Our results show for the first time that AP/FBR-CVD can be tuned for the deposition of nanocomposite ceramic coatings.
Keywords
fluidized bed , Titanium nitride , Silicon nitride , Nanocomposite , Coating
Journal title
Surface and Coatings Technology
Serial Year
2006
Journal title
Surface and Coatings Technology
Record number
1813599
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