Automated analysing of thin film nanoindentation data using the concept of the effectively shaped indenter

Recently developed analysing techniques applying the concept of the effectively shaped indenter allow a much more comprehensive analysing of nanoindentation data of thin films. The new analysing procedures have even been successfully applied in the case of very thin coatings well below 100 nm thick. Important physical mechanical parameters like Youngʹs modulus, critical stresses for phase transition and Yield strength can be determined. From the theoretical point of view, fracture toughness (critical stresses for cracks of various fracture modes) and intrinsic stresses should in principle be determinable. However, as the mathematical apparatus for such analysing procedures is rather complex and the performance of the evaluation very cumbersome and difficult to learn, it seems reasonable to develop software tools providing features for a rather automated calculation process. The present study is about the principle feasibility of such analysing tools and the state of their realisation.