Laser-induced chemical liquid deposition of discontinuous and continuous copper films

ArF and KrF laser photolysis of Cu(II) acetylacetonate in 2-propanol affords chemical liquid deposition of Cu agglomerates on quartz and glass. The process is achieved through interaction of Cu colloids with these surfaces. The films were characterized by UV–Vis spectroscopy, electron microscopy and X-ray photoelectron spectroscopy. Properties of the deposited copper agglomerates differ depending on the irradiation conditions: those produced with KrF laser radiation form continuous films, whereas those obtained with ArF laser radiation are nano-islands containing more Cu oxides in topmost layers.