Strain rate sensitivity of nanoindentation creep in polycrystalline Al film on Silicon substrate

Nanoindentation creep tests on ultra fine crystalline Al thin films with 3000 nm thickness were conducted under indentation strain rate of 0.01 s− 1, 0.05 s− 1 and 0.1 s− 1. The stress exponents increase with indentation strain rate, and the effect of strain rate sensitivity on creep property of Al thin films in large indentation is slightly higher than small indention.