• Title of article

    New approach to plasma diagnostic

  • Author/Authors

    Ryabchikov، نويسنده , , A.I. and Ryabchikov، نويسنده , , I.A. and Stepanov، نويسنده , , I.B. and Sinebryukhov، نويسنده , , A.A. and Usov، نويسنده , , Yu.P.، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2007
  • Pages
    3
  • From page
    6635
  • To page
    6637
  • Abstract
    The work is devoted to the investigation and development of innovative plasma diagnostics method based on mutual application of plasma immersion and time-of-flight approaches for ion charge state and mass measurements. It is experimentally demonstrated that despite the presence of long tails in ion current waveform measured by Faraday cup, there is a way to increase the spectrometer resolution by several times. rrent pulse FWHM equal to 170 ns was reached, that gave a possibility to use this approach for ion charge state and mass measurement for plasma with any element of the Periodic Table.
  • Keywords
    Time-of-flight spectrometry , Plasma diagnostic
  • Journal title
    Surface and Coatings Technology
  • Serial Year
    2007
  • Journal title
    Surface and Coatings Technology
  • Record number

    1816288