Title of article :
New approach to plasma diagnostic
Author/Authors :
Ryabchikov، نويسنده , , A.I. and Ryabchikov، نويسنده , , I.A. and Stepanov، نويسنده , , I.B. and Sinebryukhov، نويسنده , , A.A. and Usov، نويسنده , , Yu.P.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2007
Abstract :
The work is devoted to the investigation and development of innovative plasma diagnostics method based on mutual application of plasma immersion and time-of-flight approaches for ion charge state and mass measurements. It is experimentally demonstrated that despite the presence of long tails in ion current waveform measured by Faraday cup, there is a way to increase the spectrometer resolution by several times.
rrent pulse FWHM equal to 170 ns was reached, that gave a possibility to use this approach for ion charge state and mass measurement for plasma with any element of the Periodic Table.
Keywords :
Time-of-flight spectrometry , Plasma diagnostic
Journal title :
Surface and Coatings Technology
Journal title :
Surface and Coatings Technology