Synthesis of nanoscale multilayered ZrN/W2N multilayered coatings by magnetron sputtering

ZrN/W2N multilayered coatings with nanoscale modulation period in an ultra-high vacuum rf magnetron sputter chamber. XRD, SEM, Nano Indenter and profiler were employed to investigate the influence of modulation periods and working pressures on structural and mechanical properties of the coatings. The low-angle XRD pattern and cross-sectional SEM indicated a well-defined composition modulation and layer structure of the multilayered coating. All multilayered coatings revealed higher hardness than the rule-of-mixtures value of monolithic ZrN and W2N coatings at different working pressures. The maximum hardness was up to 34 GPa. The multilayers obtained mixed polycrystalline textures of ZrN(111), W2N(111), W2N(200) and W2N(311). 0.8 Pa was an optimum working pressure for mechanical property enhancement.