Title of article
Fabrication of highly (1000) oriented textured zinc oxide films by metal cathodic arc and oxygen dual plasma deposition and their optical properties
Author/Authors
Mei، نويسنده , , Y.F. and Fu، نويسنده , , Ricky K.Y. and Siu، نويسنده , , G.G. and Chu، نويسنده , , Paul K. and Li، نويسنده , , Z.M. and Yang، نويسنده , , C.L. and Ge، نويسنده , , Ronald W.K. and Tang، نويسنده , , Kem Z.K. and Cheung، نويسنده , , W.Y. and Wong، نويسنده , , S.P.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2007
Pages
4
From page
8348
To page
8351
Abstract
Highly (1000) oriented ZnO films were successfully grown onto silicon substrates using a dual plasma deposition process incorporating a metal cathodic arc source and oxygen ambient. The optical properties of a series of ZnO films deposited on quartz using similar conditions were investigated using UV–visible spectrophotometry, and the effects on the band gap were investigated. The absorption of C-excitons resulting in a blue-shift of the band gap at room temperature is accentuated due to strong absorption at higher energy for light polarized (E // c) in the highly (1000) oriented ZnO film.
Keywords
Zinc oxide , Cathodic arc , Plasma deposition , Optical properties
Journal title
Surface and Coatings Technology
Serial Year
2007
Journal title
Surface and Coatings Technology
Record number
1816985
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