Title of article
Ion beam energy effects on structure and properties of SiOx doped diamond-like carbon films
Author/Authors
S. Meskinis*، نويسنده , , ?. and Gudaitis، نويسنده , , R. and ?lapikas، نويسنده , , K. and Tamulevi?ius، نويسنده , , S. and Andrulevi?ius، نويسنده , , M. and Guobien?، نويسنده , , A. and Pui?o، نويسنده , , J. and Niaura، نويسنده , , G.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2008
Pages
4
From page
2328
To page
2331
Abstract
SiOx doped diamond-like carbon (DLC) films were synthesized by direct ion beam from hexamethyldisiloxane vapor. Effects of ion beam energy were studied. Variation of atomic concentration of the oxygen versus carbon with ion energy has been observed. Raman scattering spectroscopy didn’t indicate essential changes in structure of the films deposited at different ion beam energies. The synthesized films were atomically smooth. Depending on the ion energy the refractive index of the SiOx doped diamond-like carbon films varied within 2.1–2.5 and increased with increase of energy. The contact angle with water for all samples was only 61–64°.
Keywords
Ion energy , Raman scattering spectra , Contact angle with water , AFM , SiOx doped diamond-like carbon , XPS
Journal title
Surface and Coatings Technology
Serial Year
2008
Journal title
Surface and Coatings Technology
Record number
1818413
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