Fluorocarbon polymer thin films prepared by three different types of r.f. magnetron sputtering systems

Fluorocarbon polymer thin films were deposited with a poly(tetrafluoroethylene) target by three different types of r.f. magnetron sputtering systems with strong, weak and unbalanced magnetic fields. Surface morphologies, chemical structure and contact angles of water droplets of these polymer thin films were studied. Many tiny prominences can be observed at the surface of the polymer thin film deposited by the magnetron sputtering with a strong magnetic field. However, larger prominences can be observed at the surface of the polymer thin film deposited by the magnetron sputtering with a weak magnetic field. Both of these tiny and large prominences can be observed at the surface of the polymer thin film deposited by an unbalanced magnetron sputtering. Five peaks can be separated in C(1s) XPS spectra of these polymer thin films. However peak intensities of these peaks are different. Peak intensity which represents CF2 decreased with increase of the magnetic field.