Hydrogen quantification of magnetron sputtered hydrogenated amorphous carbon (a-C:H) coatings produced at various bias voltages and their tribological behavior under different humidity levels

Hydrogenated amorphous carbon (a-C:H) films have extraordinary tribological properties under dry conditions since the C-atoms at the surface are hydratized and not available for any bonding with the opposing material. Under wet conditions water molecules are weakly absorbed by the a-C:H-coatings so the interaction between the coating surface and the tribological counterpart changes to a dipole-like interaction which is disadvantageous for the tribological performance. According to this, the hydrogen-content plays an important role in the wear and friction behavior of diamond-like carbon (DLC) coatings under different humid conditions. ork focuses on the quantification of the hydrogen content of differently bias a-C:H top layered coating systems and their influence on the tribological behavior under different humidity conditions. By means of a magnetron sputter device DLC-coating systems with an a-C:H-top layer have been deposited at bias voltages between − 75 and − 200 V. In order to quantify the hydrogen content of the layers Nuclear Reaction Resonance Analysis (NRRA) was used. In combination with the results of the tribological tests under different humid conditions using a ball-on-disk-tester, correlations between the hydrogen content, the bias voltage and the wear and friction performance were made. A clear relationship between the bias voltage and the hydrogen content has been observed, since the values decrease consistently from 27.2 at.% at − 75 V to a minimum of 19.9 at.% at − 200 V bias voltage. Furthermore the different humidity levels show a strong influence on the tribological performance, while the bias voltage effects mainly the wear and friction results of the samples tested under wet conditions.