Rh-nanoparticle-dispersed ZrO2 films prepared by laser chemical vapor deposition

Rhodium-nanoparticle-dispersed zirconia (Rh/ZrO2) films were prepared by laser chemical vapor deposition using Rh and Zr dipivaloylmethanate precursors. The effects of deposition conditions and heat treatment on the microstructures of ZrO2 and Rh/ZrO2 films were investigated. At a deposition temperature of 1180 K and a Rh to Zr source molar ratio (RRh/Zr) of 0.05, Rh nanoparticles precipitated on the surface of a (020)-oriented ZrO2 matrix having a feather-like structure. The diameter of the Rh nanoparticles increased from 25 to 70 nm as RRh/Zr increased from 0.01 to 0.10. The microstructure of the Rh nanoparticles and the feather-like structure of the ZrO2 matrix were unchanged after heat treatment at 873 K in air for 10 h.