On the elastic modulus and hardness of co-sputtered Zr–Cu–(N) thin metal glass films

This work focuses on the properties of Zr–Cu–(N) deposits obtained by magnetron co-sputtering of Zr and Cu targets in pure argon or in argon nitrogen gas mixtures. Microstructure and mechanical properties (hardness and Youngʹs modulus) were investigated versus deposition parameters. The composition of the Zr–Cu alloy films on the full binary range was accurately controlled by means of the discharge current intensity on both Zr and Cu targets. Deposits were observed to be amorphous single phased in a large range of copper content, the hardness and Youngʹs modulus of the amorphous phase increasing with the latter. A small amount of nitrogen in the gas mixture leads to higher hardness and Youngʹs modulus values.