Laser chemical vapor deposition of single-crystalline transparent CeO2 films

Single-crystalline transparent CeO2 films were prepared on (100) SrTiO3 single-crystal substrates by laser chemical vapor deposition. At deposition temperatures ranging from 952 to 1080 K, epitaxial (100) CeO2 films grew as columnar grains, which resulted in opaque films. The epitaxial CeO2 film prepared at 1120 K exhibited a flat surface and dense cross section. The epitaxial CeO2 films grown on SrTiO3 substrates showed coherent lattice matching at the interface, even at high deposition rates of 15–25 μm h− 1. The epitaxial relationship was CeO2 [100]//SrTiO3 [100] and CeO2 [011]//SrTiO3 [001]. The epitaxial CeO2 film prepared at 1120 K was a highly transparent single-crystalline film, and the transmittance at a wavelength of 600 nm reached 97% of the SrTiO3 substrate.