Mechanical and tribological properties of AlTiN/AlCrBN multilayer films synthesized by cathodic arc evaporation

AlTiN/AlCrBN multilayer films were synthesized by means of cathodic arc evaporation. The influence of the individual layer thicknesses on mechanical and tribological properties was systematically investigated and compared with AlCrBN single layer films. AlCrB targets with 10 and 20 at.% B, respectively, were used in combination with AlTi targets, having an Al/Ti ratio of 1. The multilayer films exhibit enhanced hardness and significantly reduced residual compressive stress together with improved wear resistance compared to AlCrBN single layer films.