Title of article :
Elaboration and characterization of Fe/silica-nanofilm tailored surfaces
Author/Authors :
Koltsov، نويسنده , , Alexey and Pavlova، نويسنده , , Lydia and Kukin، نويسنده , , Vladimir S. Prikhodko، نويسنده , , Alexander and Cornu، نويسنده , , Marie-José and Kirilenko، نويسنده , , Elena، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2014
Abstract :
PECVD method with subsequent photolithography process has been used to create different tailored surfaces of Fe/silica with silicon oxide representative to that formed during recrystallization annealing of Si alloyed steels, i.e. stoichiometric, amorphous and about 50 nm in thickness. The tailored surfaces have been characterized by different analytical techniques like XPS, AES, Raman, FIB-TEM, AFM and mechanical profilometry.
Keywords :
Photolithography , Iron , PECVD , Silicon oxide , patterning , Thin films
Journal title :
Surface and Coatings Technology
Journal title :
Surface and Coatings Technology
