Approximate linear relation between reduced modulus and stiffness in completely amorphous Si–C–N films

An approximately linear relation between reduced modulus (Er) and stiffness (S) was observed based on the characterization of completely amorphous Si–C–N hard films by means of nanoindentation. This linear relation was verified by a series of amorphous Si–C–N films prepared under different experimental conditions. Furthermore the linear relation can be extended to amorphous Si–B–C–N film systems. This finding provides one possible way to evaluate the hardness and reduced modulus of a material without involving the contact area.