Author/Authors :
Chen، نويسنده , , S. and Fan، نويسنده , , L.L. and Wang، نويسنده , , J. and Pan، نويسنده , , Y. and Chen، نويسنده , , F.H. and Xu، نويسنده , , P.S. and Zou، نويسنده , , C.W. and WU، نويسنده , , Z.Y.، نويسنده ,
Abstract :
A self-focusing e-beam evaporator for carbon flux source in a molecular beam epitaxy (MBE) system has been designed and optimized. It is found that the configuration of the e-beam evaporator is very important for the solid carbon evaporation. According to the electric field simulation and the followed suitable design, the self-focusing e-beam evaporator for carbon flux evaporation can be achieved with high efficiency and good stability. This easy designed e-beam evaporator is adopted to produce stable and controllable carbon flux in a MBE system for large-area graphene layers preparation, which shows promising application for graphene-based device fabrication in the future.
Keywords :
Electric field , Molecular Beam Epitaxy , E-beam evaporator , graphene
