Tribological properties of CrZr–Si–N films synthesized using Cr–Zr–Si segment targets

In this work, CrZr–Si–N films with various Si contents were synthesized by unbalanced magnetron sputtering with various (Cr + Zr):Si segment targets. Three types of segment targets with different volume ratios of Cr + Zr and Si (11:1, 5:1 and 3:1 vol.%) were employed. Tribological properties of CrZr–Si–N films, as a function of the Si content, were investigated by a ball-on-disk type wear tester at room temperature and 500 °C. After the wear test, the wear tracks were investigated by scanning electron microscope (SEM), energy dispersive spectroscopy (EDS), X-ray diffraction (XRD) and Raman spectroscopy. The results showed that the CrZr–Si–N films with low Si content showed excellent tribological properties at the room temperature such as low friction coefficient and smooth, narrow wear track diameter. However, at 500 °C the tribological properties of CrZr–Si–N films were significantly improved with increasing Si content in the films as the thermal stabilities of CrZr–Si–N films were improved with increasing Si content.