Title of article :
Using expert technology to select unstable slicing machine to control wafer slicing quality via fuzzy AHP
Author/Authors :
Che-Wei Chang، نويسنده , , Cheng-Ru Wu، نويسنده , , Huang-Chu Chen، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2008
Keywords :
Modified Delphi method , Fuzzy analytical hierarchy process , EWMA control chart , Silicon wafer slicing
Journal title :
Expert Systems with Applications
Journal title :
Expert Systems with Applications