Title of article
Using expert technology to select unstable slicing machine to control wafer slicing quality via fuzzy AHP
Author/Authors
Che-Wei Chang، نويسنده , , Cheng-Ru Wu، نويسنده , , Huang-Chu Chen، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2008
Pages
11
From page
2210
To page
2220
Keywords
Modified Delphi method , Fuzzy analytical hierarchy process , EWMA control chart , Silicon wafer slicing
Journal title
Expert Systems with Applications
Serial Year
2008
Journal title
Expert Systems with Applications
Record number
187034
Link To Document