Surface modification in microsystems and nanosystems

Phenomena in microsystems and nanosystems are influenced by the device walls due to the high surface-area-to-volume ratios that are a characteristic feature of these systems. The role of surfaces in these small-scale systems has led to natural interest in developing methods to manipulate surface-mediated phenomena toward improving device performance, developing next generation systems, and mitigating problems that arise due to interfacial interactions between surfaces and materials within microscale and nanoscale systems. This report presents a critical review of the existing literature as it relates to role of surfaces and surface modification in microsystems and nanosystems. In addition, this report strives to present this literature review with an eye on the tutorial aspect of surface modification for new researchers. Toward the dual goal of presenting a tutorial review with a critical analysis of literature many open scientific questions are discussed. Both chemical and physical surface modification methods are discussed with several examples, applications, and a brief description of underlying theory. The importance of surfaces in microsystems and nanosystems and the applicability of controlling surface properties in a systematic manner for both fundamental science and applied studies is also discussed. The readers are pointed to several pioneering research efforts over the years that have made surface modification and surface science a rich, diverse, and multi-disciplinary research field. It is hoped that this report will assist researchers from diverse fields by providing a collection of varied references and encourage the next generation of surface scientists and engineers to significantly advance the state of knowledge.