Author/Authors :
Le، نويسنده , , Ha-Linh Thi and Forero-Martinez، نويسنده , , Nancy C. and Vach، نويسنده , , Holger، نويسنده ,
Abstract :
A silicon surface which was partly damaged by the violent impact of hydrogenated silicon clusters has been treated by atomic hydrogen. After the exposure with hydrogen atoms, we observe that the ill-defined silicon surface is rearranged to its initial crystalline structure and that the silicon atoms of the deposited cluster are now incorporated in the crystalline structure of the repaired substrate surface.
